KXP74 SERIES
- Tri-axis, 1.5g - 6g, Digital (SPI) Output, 5x5x1.2mm DFN
These high-performance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an ASIC packaged in a 5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE) processes and is protected from the environment by a hermetically-sealed silicon cap at the wafer level.- The KXP74 series is designed to provide a high signal-to-noise ratio with excellent performance over temperature. These sensors can accept supply voltages between 2.7V and 5.25V. Sensitivity is factory programmable allowing customization for applications requiring from ±1.5g to ±6.0g ranges. Sensor bandwidth is user-definable.
- The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. This voltage is digitized by an on-board A/D converter and is accessed via a Serial Peripheral Interface (SPI). The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.
- An evaluation board is available upon request.
DATA SHEET
KXP74 Product Series
PRODUCT SPECIFICATIONS
Product Range(g) Sensitivity
(mg/count)Offset Operating
Voltage(V)Output Temperature(°C) Package KXP74-1050 2 1.22 2048 (counts) 2.8 Digital SPI -40 to +85 5x5x1.2mm DFN
